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Low voltage MEMS analog micromirror arrays with hidden vertical comb-drive actuators
| Content Provider | Semantic Scholar |
|---|---|
| Author | Hah, Dooyoung Huang, Shian-Chang Nguyen, Hung Dinh Chang, Hsin Hsin Tsai, Jennifer Wu, Ming-Chuan Toshiyoshi, Hiroshi |
| Copyright Year | 2002 |
| Abstract | We report on a novel, polysilicon surface-micromachined one-dimensional (1-D) analog micromirror array. Large continuous DC scan angle (23.6° optical) and low operating voltage (6V) have been achieved using vertical comb-drive actuators. The actuators and torsion springs are placed underneath the mirror (137 × 120 μm) to achieve high fill-factor (91%). The measured resonant frequency of the mirror ranges from 3.4 kHz to 8.1 kHz. The static scanning characteristics show good uniformity (<±3.2%) for a 1 × 10 array with a mirror pitch of 150 μm. The measured DC scanning characteristics and resonant frequencies agree well with theoretical values. This micromirror array has applications in optical wavelength-division multiplexed (WDM) routers and wavelength-selective crossconnect (WSXC). |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://www.colorado.edu/MCEN/MEMSII/Papers/MingWupaper.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
