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Temperature measurements in microwave argon plasma source by using overlapped molecular emission spectra
| Content Provider | Semantic Scholar |
|---|---|
| Author | Abdel-Fattah, E. Bazavan, M. Shindo, Hironori |
| Copyright Year | 2015 |
| Abstract | The electron excitation temperature Texc, vibrational Tvib, and rotational Trot temperatures were measured in a high-pressure line-shaped microwave plasma source in argon over a wide range of gas pressure and microwave power, by using optical emission spectra. The selected ArI transition lines 5p-4s and 4p-4s were chosen to calculate electron excitation temperature using Boltzmann's plot method. Meanwhile, the emission spectra of hydroxyl OH molecular ( A2Σ+−X2Πi,Δν=0) band and the nitrogen N2 second positive system ( C3Πu−B3Πg,Δν=+1), both second diffraction order, were used to evaluate the vibrational Tvib and rotational Trot temperatures using the method of comparing the measured and calculated spectra with a chi-squared minimization procedure. The components of the overlapped spectrum are greatly influenced by the gas pressure; however, they are independent on microwave power. For temperatures, it was found that the Texc dramatically decreases from 2.5 to 0.75 eV, which qualitatively agrees with Te de... |
| Starting Page | 093509 |
| Ending Page | 093509 |
| Page Count | 1 |
| File Format | PDF HTM / HTML |
| DOI | 10.1063/1.4930133 |
| Volume Number | 22 |
| Alternate Webpage(s) | http://repository.psau.edu.sa/jspui/retrieve/63c525b1-6d63-4705-b209-138b21453bcc/Essam%20POP%202015.pdf |
| Alternate Webpage(s) | https://doi.org/10.1063/1.4930133 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
