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Ultra High Resolution Scanning Electron Microscope (特集 先端技術開発)
| Content Provider | Semantic Scholar |
|---|---|
| Author | Rignall, Mike Walker, Andrew Konishi, Ikuo |
| Copyright Year | 2005 |
| Abstract | Air compressor STEM holder Photomultiplier power supply unit Water circulator Faraday cup Items Description Room temperature 15 ~ 25°C Humidity 60% RH or less (non-condensing) Power 5kVA, 50/60Hz, Single phase AC100 ~ 240V ±10% Grounding 100 Ω or less Cooling water flow 0.6 ~ 1.0 l/min Pressure 50 ~ 100kPa Temperature 15 ~ 20 °C (allowable fluctuations 0.5°C /10min or less) Supply faucet Rc3/8 tapered female thread x1 Drain port (20mm dia. or more) x1 (Natural drain type located on floor) |
| Starting Page | 167 |
| Ending Page | 171 |
| Page Count | 5 |
| File Format | PDF HTM / HTML |
| Volume Number | 62 |
| Alternate Webpage(s) | http://www.hitachi-hightech.com/file/ca/pdf/library/literature/HTD-E193-HitachiSU9000-FESEM-brochure_0.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |