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Photoelectric-Charging-Enhanced MEMS Electret Energy Harvester with Vacuum Packaging
| Content Provider | Semantic Scholar |
|---|---|
| Author | Suzuki, Yuji |
| Copyright Year | 2016 |
| Abstract | A novel MEMS electret energy harvester charged with UV light after sealed in a vacuum package is proposed. By 265 nm UV irradiation, electrons are generated inside the package through the photoelectric effect. Uniform surface potential on sidewalls of the comb drives has been obtained. With a MEMS electret generator in a 60 Pa package, 2.28 μW has been obtained at 1 g and 740 Hz, which is 10 times higher than the output power at the atmospheric pressure. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://iopscience.iop.org/article/10.1088/1742-6596/773/1/012012/pdf |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | Charge (electrical) Electrons Harvester Hertz (Hz) Immunoglobulin lambda-Chains Intrinsic drive Medication Event Monitoring System Microelectromechanical systems Photoelectric effect |
| Content Type | Text |
| Resource Type | Article |