NDLI: Bulk PZT Cantilever Based MEMS Acoustic Transducer for Cochlear Implant Applications †

Content Provider	Semantic Scholar
Author	Koyuncuoğlu, Aziz İlik, Bedirhan Chamanian, Salar Ulusan, Hasan Ashrafi, Parinaz Işık, Dilek Ulubaş Külah, Haluk
Copyright Year	2017
Abstract	This paper presents the first acoustic experimental results of a MEMS based bulk piezoelectric transducer for use in fully implantable cochlear implants (FICI). For this purpose, the transducer was attached onto an acoustically vibrating membrane. Sensing and energy harvesting performances were measured using neural stimulation and rectifier circuits, respectively. The chip has a 150 Hz bandwidth around 1800 Hz resonance frequency that is suitable for mechanical filtering as a sensor. As an energy harvester, bulk piezoelectric transducer generated a rectified power of 16.25 μW with 2.47 VDC with 120 dB-A sound input at 1780 Hz. Among other MEMS acoustic energy harvesters in the literature, reported transducer has the highest power density (1.5 × 10−3 W/cm3) to our knowledge.
File Format	PDF HTM / HTML
Alternate Webpage(s)	http://mdpi.com/2504-3900/1/4/584/pdf
Language	English
Access Restriction	Open
Subject Keyword	Acoustic cryptanalysis Cochlear implant Hertz (Hz) Implantable defibrillator Medication Event Monitoring System Microelectromechanical systems Performance Piezoelectricity Rectifier Device Component Resonance Tissue membrane Transducer Device Component
Content Type	Text
Resource Type	Article

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