NDLI: Kinetic Monte Carlo Simulation of Epitaxial Thin Film Growth : Formation of Submonolayer Islands and Multilayer Mounds

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Kinetic Monte Carlo Simulation of Epitaxial Thin Film Growth : Formation of Submonolayer Islands and Multilayer Mounds

Content Provider	Semantic Scholar
Author	Evans, James W. Thiel, Patricia A. Li, Maozhi
Copyright Year	2016
Abstract	We consider homoepitaxy (or low-misfit heteroepitaxy) via vapor deposition or MBE under UHV conditions. Thin film growth is initiated by nucleation and growth of 2D islands in the submonolayer regime. For atoms subsequently deposited on top of islands, a step edge barrier often inhibits downward transport and produces kinetic roughening during multilayer growth. Such unstable growth is characterized by the formation of 3D mounds (multilayer stacks of 2D islands). Kinetic Monte Carlo (KMC) simulation of suitable atomistic lattice-gas models can address fundamental or general issues related to both submonolayer and multilayer film evolution, and can also provide a predictive tool for morphological evolution in specific systems. Examples of the successes of KMC modeling are provided for metal homoepitaxial film growth, specifically for contrasting behavior in the classic Ag/Ag(100) and Ag/Ag(l 11) systems.
File Format	PDF HTM / HTML
Alternate Webpage(s)	https://lib.dr.iastate.edu/cgi/viewcontent.cgi?article=1001&context=chem_conf
Alternate Webpage(s)	http://lib.dr.iastate.edu/cgi/viewcontent.cgi?article=1001&context=chem_conf
Language	English
Access Restriction	Open
Subject Keyword	3D film Control theory Epitaxy Extraction Kinetic Monte Carlo Kinetics Kinetics Internet Protocol Mathematical morphology Molecular dynamics Monte Carlo method Multilayer perceptron Parkinson Disease Physical vapor deposition Predictive modelling Quantum fluctuation Silver Simulation Triune continuum paradigm Unstable Medical Device Problem Vacuum deposition
Content Type	Text
Resource Type	Article

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