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Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system
| Content Provider | Semantic Scholar |
|---|---|
| Author | Wang, Keping Bohringer, K. F. Sinclair, M. Starkweather, G. |
| Copyright Year | 2003 |
| Abstract | This paper presents likely the world's smallest electrostatic visible light highly space-efficient transmissive micro-optical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150 /spl mu/m/spl times/150 /spl mu/m spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47 /spl mu/m/spl times/160 /spl mu/m size can achieve a maximum static lateral displacement of 10 /spl mu/m at 38 V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6 kHz. |
| Starting Page | 1 |
| Ending Page | 10 |
| Page Count | 10 |
| File Format | PDF HTM / HTML |
| DOI | 10.1109/sensor.2003.1215381 |
| Alternate Webpage(s) | http://www.ee.washington.edu/research/mems/publications/2003/conferences/transducers-kwang-03.pdf |
| Alternate Webpage(s) | https://www.ee.washington.edu/research/mems/publications/2003/conferences/transducers-kwang-03.pdf |
| Alternate Webpage(s) | https://www2.ee.washington.edu/research/mems/publications/2003/conferences/transducers-kwang-03.pdf |
| Alternate Webpage(s) | https://doi.org/10.1109/sensor.2003.1215381 |
| Volume Number | 1 |
| Journal | TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
