NDLI: Micro-optical Components for a MEMS Integrated Display

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Micro-optical Components for a MEMS Integrated Display

Content Provider	Semantic Scholar
Author	Wanga, Kerwin Weia, Khye-Suian Sinclairb, Mike Böhringera, Karl F.
Copyright Year	2003
Abstract	Today, Cathode Ray Tube (CRT) and Liquid Crystal Display (LCD) are the two mainstream display technologies. Plasma display panels (PDP) are thinner than CRT displays and brighter than LCD with good contrast ratio, contributing to the rapid growth in the wall display market. However, each display technology can address only a limited market segment, according to its characteristic advantages and limitations. Microelectro-mechanical display systems are attracting a lot of attention because of their potentially low power consumption, higher contrast ratio and cost effectiveness [1]. Several optical MEMS based display technologies have been proposed such as DLP [2], GLV [3], IMod [4], Gyricon [5] and LCOS [6]. Among these technologies, the major challenge in commercialization of MEMS displays is the cost of the production and packaging. Thus, the next generation of MEMS displays must include key components developed for the improvement of device performance and the reduction of manufacturing costs. This paper summarizes the results from our previous published papers on reflective [7] and transmissive [8] optical switches, as well as microlens arrays for MEMS integrated display systems. They are three key components for MEMS, including: 1) a dual-servo-scanning mirror, which makes use of thermal and electrostatic driving principles for low voltage large static tiltingangle reflective optical switching or scanning; 2) a transmissive zigzag electrostatic microoptical switch (TMOS); 3) and a process for making microlens arrays without expensive processing costs for fabrication. The prototypes of reflective and transmissive optical switches are fabricated in the Cronos MUMPs® foundry process.
File Format	PDF HTM / HTML
Alternate Webpage(s)	http://www.ee.washington.edu/research/mems/publications/2003/conferences/iwpsd-kwang-03.pdf
Alternate Webpage(s)	https://www2.ee.washington.edu/research/mems/publications/2003/conferences/iwpsd-kwang-03.pdf
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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