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Measurement of Adhesion Strength of DLC Film Prepared by Utilizing Plasma-Based Ion Implantation
| Content Provider | Semantic Scholar |
|---|---|
| Author | Oka, Yoshihiro Yatsuzuka, Mitsuyasu |
| Copyright Year | 2006 |
| Abstract | High-adhesion diamond-like carbon (DLC) film was prepared by a hybrid process of plasma-based ion implantation and deposition using superimposed RF and high-voltage pulses. The adhesion strength of DLC film on a stainless steel (SUS304) was enhanced by the carbon ion implantation to the substrate. Furthermore, ion implantation of mixed carbon and silicon led to considerable enhancement of adhesion strength above the resin glue strength. The adhesion strength of DLC film on the aluminum alloy (A-5052) was improved above the resin glue strength only by the carbon ion implantation to the substrate. |
| Starting Page | 801 |
| Ending Page | 806 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| DOI | 10.1541/ieejfms.126.801 |
| Volume Number | 126 |
| Alternate Webpage(s) | https://www.jstage.jst.go.jp/article/ieejfms/126/8/126_8_801/_pdf |
| Alternate Webpage(s) | https://doi.org/10.1541/ieejfms.126.801 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |