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STRUCTURE OF ANOVERLAY MARKAND ITS DOSMETRY APPLICATION BACKGROUND OF THE INVENTION 1. Field of the Invention
| Content Provider | Semantic Scholar |
|---|---|
| Copyright Year | 2017 |
| Abstract | (75) Inventors: Cheng-Hung Yu, Hsinchu (TW); 4,356,223 A * 10/1982 Iida et al. ..................... 33/613 Chi-Liang Kuo, Hsinchu (TW) 5,504,999 A 4/1996 Barr ............................ 33/645 5,557.855 A * 9/1996 Hwang ........................ 33/613 (73) Assignee: United Microelectronics Corp., * cited by examiner Hsinchu (TW) Primary Examiner-Christopher W. Fulton (*) Notice: Subject to any disclaimer, the term of this (74) Attorney, Agent, or Firm-Charles C. H. Wu, Wu & patent is extended or adjusted under 35 Cheung, LLP U.S.C. 154(b) by 0 days. (57) ABSTRACT |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/1f/b1/b8/4122ab774ef137/US6571485.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |