NDLI: Etude et réalisation de capteurs de gaz à base de silicium poreux

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Etude et réalisation de capteurs de gaz à base de silicium poreux

Content Provider	Semantic Scholar
Author	Ghellai, Nassera Chiali, Anisse Chabane-Sari, N. E. Gabouze, N.
Copyright Year	2011
Abstract	L‟interet croissant pour la prevention de la pollution de l‟environnement est devenu ces dernieres annees un facteur cle dans le developpement de toute industrie, en particulier celle des materiaux largement utilises en microelectronique. Dans ce cadre,le silicium poreux a suscite une grande attention comme materiau applique a la detection en raison de la haute sensibilite de sa surface interne a la presence de gaz et d‟humidite. Dans notre travail, on se propose de controler les variations des proprietes electriques des capteurs a base de silicium poreux, causees par des substances chimiques gazeuses. Plusieurs caracteristiques electriques de notre structure ont ete etudiees afin de verifier la regle connue des six « S » : Sensibilite (sensibility); selectivite (selectivity), reponse rapide (speed of reponse), stabilite (stability), la taille/la forme (size/shape) et le cout ($/cost.). Les resultats montrent que les caracteristiques courant-tension et capacite-tension sont modifiees par la reactivite du gaz sur la surface de notre capteur et ceci pour differents gaz et differentes concentrations. En outre, les resultats montrent que la conduction change selon la nature du gaz. Mot cles : Silicium Poreux - Detecteur - Gaz - Caracteristiques Electriques
Starting Page	40
Ending Page	47
Page Count	8
File Format	PDF HTM / HTML
Volume Number	23
Alternate Webpage(s)	https://www.ajol.info/index.php/srst/article/download/117789/107447
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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