NDLI: Fabrication of nanoscale zero-mode waveguides using microlithography for single molecule sensing.

Content Provider	Semantic Scholar
Author	Teng, Chu-Hsiang Lionberger, Troy A. Zhang, Jin Meyhöfer, Edgar Ku, Pei-Cheng
Copyright Year	2012
Abstract	We present a novel approach to the fabrication of zero-mode waveguides (ZMWs) using inexpensive processing techniques. Our method is capable of rapid fabrication of circular nanoapertures with diameters ranging from 70 nm to 2 μm, allowing us to perform a detailed characterization of the dependence of the fluorescence emission on the waveguide diameter. We also validated the use of the fabricated ZMWs by detecting single molecule binding events with a signal-to-noise ratio of ten.
Starting Page	455301
Ending Page	455301
Page Count	1
File Format	PDF HTM / HTML
DOI	10.1088/0957-4484/23/45/455301
PubMed reference number	23085680
Journal	Medline
Volume Number	23
Issue Number	45
Alternate Webpage(s)	https://deepblue.lib.umich.edu/bitstream/handle/2027.42/98608/0957-4484_23_45_455301.pdf?sequence=1
Alternate Webpage(s)	https://doi.org/10.1088/0957-4484%2F23%2F45%2F455301
Journal	Nanotechnology
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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Fabrication of nanoscale zero-mode waveguides using microlithography for single molecule sensing.