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Phase modulation in pulsed dual-frequency capacitively coupled plasmas
| Content Provider | Semantic Scholar |
|---|---|
| Author | Zhang, Q. Jiang, Wei Song, Yuan-Hong Bogaerts, Annemie Wang, You-Nian |
| Copyright Year | 2014 |
| Abstract | Particle-in-cell/Monte Carlo collision simulations, coupled with an external circuit, are used to investigate the behavior of pulsed dual-frequency (DF) capacitively coupled plasmas (CCPs). It is found that the phase shift θ between the high (or low) frequency source and the pulse modulation has a great influence on the ion density and the ionization rate. By pulsing the high frequency source, the time-averaged ion density shows a maximum when θ = 90∘. The time-averaged ion energy distribution functions (IEDFs) at the driven electrode, however, keep almost unchanged, illustrating the potential of pulsed DF-CCP for independent control of ion density (and flux) and ion energy. A detailed investigation of the temporal evolution of the plasma characteristics indicates that several high frequency harmonics can be excited at the initial stage of a pulse period by tuning the phase shift θ, and this gives rise to strong sheath oscillations, and therefore high ionization rates. For comparison, the pulsing of the l... |
| Starting Page | 233303 |
| Ending Page | 233303 |
| Page Count | 1 |
| File Format | PDF HTM / HTML |
| DOI | 10.1063/1.4884225 |
| Alternate Webpage(s) | https://www.uantwerpen.be/images/uantwerpen/container2642/files/jap14phase.pdf |
| Alternate Webpage(s) | https://doi.org/10.1063/1.4884225 |
| Volume Number | 115 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
