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Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma
| Content Provider | Scilit |
|---|---|
| Author | Wang, Hongyu Jiang, Wei Sun, Peng Zhao, Shuangyun Li, Yang Hongyu, Wang Wei, Jiang Peng, Sun Shuangyun, Zhao Yang, Li |
| Copyright Year | 2016 |
| Description | Journal: Plasma Science and Technology We analyzed perpendicularly configured dual-frequency (DF) capacitively coupled plasmas (CCP). In this configuration, two pairs of electrodes are arranged oppositely, and the discharging is perpendicularly driven by two radio frequency (RF) sources. Particle-in-cell/Monte Carlo (PIC/MC) simulation showed that the configuration had some advantages as this configuration eliminated some dual frequency coupling effects. Some variation and potential application of the discharging configuration is discussed briefly. |
| Related Links | http://arxiv.org/pdf/0912.5129 http://iopscience.iop.org/article/10.1088/1009-0630/18/2/08/pdf |
| Ending Page | 146 |
| Page Count | 4 |
| Starting Page | 143 |
| ISSN | 10090630 |
| e-ISSN | 20586272 |
| DOI | 10.1088/1009-0630/18/2/08 |
| Journal | Plasma Science and Technology |
| Issue Number | 2 |
| Volume Number | 18 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2016-02-01 |
| Access Restriction | Open |
| Subject Keyword | Journal: Plasma Science and Technology Nuclear Energy and Engineering Perpendicularly Driven Dual Frequency Capacitively Coupled Plasmas Driven Dual Frequency Capacitively |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics |
