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Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma
| Content Provider | Semantic Scholar |
|---|---|
| Author | Wang, Hong-Yu Jiang, Wei Bi, Zhenhua Wang, Younian |
| Copyright Year | 2009 |
| Abstract | We proposed an altered configuration for dual-frequency (DF) capacitively coupled plasmas (CCP). In this configuration, two pairs of electrodes are arranged oppositely, and the discharging is perpendicularly driven by two rf sources. With Particle-in-cell/Monte Carlo method, we have demonstrated this configuration can remove the harmful electromagnetic and DF coupling effects in conventional DF-CCP. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://arxiv.org/pdf/0912.5129v1.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |