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Construction of Larger Area Density-Uniform Plasma with Collisional Inductively Coupled Plasma Cells
| Content Provider | Scilit |
|---|---|
| Author | Liang, Ouyang Wandong, Liu Xiaoyan, Bai Zhipeng, Chen Huihui, Wang Hong, Li Chen, Luo Liangliang, Ji Bei, Hu |
| Copyright Year | 2007 |
| Description | Journal: Plasma Science and Technology The plasma density and electron temperature of a multi-source plasma system composed of several collisional inductively coupled plasma (ICP) cells were measured by a double-probe. The discharges of the ICP cells were shown to be independent of each other. Furthermore, the total plasma density at simultaneous multi-cell discharge was observed to be approximately equal to the summation of the plasma density when the cells discharge separately. Based on the linear summation phenomenon, it was shown that a larger area plasma with a uniform density and temperature profile could be constructed with multi-collisional ICP cells. |
| Related Links | http://iopscience.iop.org/article/10.1088/1009-0630/9/3/03/pdf |
| Ending Page | 268 |
| Page Count | 4 |
| Starting Page | 265 |
| ISSN | 10090630 |
| e-ISSN | 20586272 |
| DOI | 10.1088/1009-0630/9/3/03 |
| Journal | Plasma Science and Technology |
| Issue Number | 3 |
| Volume Number | 9 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2007-06-01 |
| Access Restriction | Open |
| Subject Keyword | Journal: Plasma Science and Technology Collisional Inductively |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics |
