NDLI: The effect of target-substrate distance on surface morphology and properties of β-FeSi2 films prepared by pulsed laser deposition

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The effect of target-substrate distance on surface morphology and properties of β-FeSi2 films prepared by pulsed laser deposition

Content Provider	Scilit
Author	Ma, Yuying Liu, Linhua Ren, Xiankun Liu, Aihua
Copyright Year	2018
Description	Journal: Iop Conference Series: Materials Science and Engineering Semiconducting iron disilicide $(β-FeSi_{2}$) has been studied as thermoelectric materials, ferromagnetic materials and also optoelectronic materials. Since $β-FeSi_{2}$ was successfully fabricated on Si (100) substrate by pulsed laser deposition (PLD) and followed annealing, we investigated the structural properties and crystallographic orientation of the films by X-ray diffraction (XRD) analysis. And also the scanning electron microscopy (SEM) was used to determine the structural properties and surface images of the films. Typical XRD patterns of the films show that no other diffraction peak can be found except $β-FeSi_{2}$ and Si. The SEM results show that the films are composed of well-distributed grains, in the range of 100 - 200 nm in diameter. Atomic force microscope (AFM) and Fourier transform infrared (FTIR) spectroscopy were also used to characterize the fabricated $β-FeSi_{2}$ films. We can find the roughness of the films and want to get the optimum conditions for the preparation of $β-FeSi_{2}$ films on Si (100) substrate by PLD.
Related Links	http://iopscience.iop.org/article/10.1088/1757-899X/452/2/022153/pdf
ISSN	17578981
e-ISSN	1757899X
DOI	10.1088/1757-899x/452/2/022153
Journal	Iop Conference Series: Materials Science and Engineering
Issue Number	2
Volume Number	452
Language	English
Publisher	IOP Publishing
Publisher Date	2018-12-12
Access Restriction	Open
Subject Keyword	Journal: Iop Conference Series: Materials Science and Engineering Condensed Matter Physics Β Fesi
Content Type	Text
Resource Type	Article

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