NDLI: Influences of annealing temperature on the thermoelectric properties of thin film thermocouples based on a flexible substrate by RF magnetron sputtering

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Influences of annealing temperature on the thermoelectric properties of thin film thermocouples based on a flexible substrate by RF magnetron sputtering

Content Provider	Scilit
Author	Liu, Zhaojun Tian, Bian Liu, Jiangjiang Zhang, Zhongkai Lin, Qijing Mao, Qi Lu, Dejiang Jiang, Zhuangde
Copyright Year	2020
Description	Journal: Measurement Science and Technology A thin ﬁlm thermocouples (TFTCs) based on flexible substrate (Polyimide) are designed and fabricated by radio frequency (RF) magnetron sputtering to satisfy the application needs of real-time monitoring of surface temperature of non-planar objects. The microstructure and thermoelectric property of TFTCs are investigated under different annealing temperature and the results show that the best annealing treatment result is 200℃ for one hour. After annealing treatment, the temperature resolution of the flexible TFTCs can reach 0.1℃, the hysteresis error and repeatability error can reach to 0.094mV and 1.287%. The experiment of electromotive force (EMF) show the average Seebeck coefﬁcient of flexible TFTCs annealed at 300℃ reach to 56.90µV/℃ which is more than 8.5 times higher than unannealed one when the temperature difference is 200℃. In addition, different output characteristics are obtained when TFTCs are placed on the inner or outer surfaces with different curvatures. Keeping the temperature difference between the hot and cold ends of the TFTCs constant, the flexible TFTCs also has the ability to measure the angle by measuring the EMF. The sensors show good application prospects in temperature measurement in curved plane and the curvature measurement of curved surface.
Related Links	https://iopscience.iop.org/article/10.1088/1361-6501/ab8c10/pdf
ISSN	09570233
e-ISSN	13616501
DOI	10.1088/1361-6501/ab8c10
Journal	Measurement Science and Technology
Issue Number	9
Volume Number	31
Language	English
Publisher	IOP Publishing
Publisher Date	2020-04-22
Access Restriction	Open
Subject Keyword	Journal: Measurement Science and Technology
Content Type	Text
Resource Type	Article
Subject	Applied Mathematics Instrumentation Engineering

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