NDLI: Thermoelectric Properties of Cobalt Antimony Thin Films Deposited on Flexible Substrates by Radio Frequency Magnetron Sputtering

Content Provider	Springer Nature Link
Author	Fan, Ping Zhang, Yin Zheng, Zhuang hao Fan, Wei fang Luo, Jing ting Liang, Guang xing Zhang, Dong ping
Copyright Year	2014
Abstract	Cobalt antimony thin films were deposited on flexible substrates at room temperature by radio frequency magnetron sputtering with different sputtering power. The atomic ratio of Co to Sb in the cobalt antimony thin film was closest to 1:3 when the sputtering power was 55 W. The thermoelectric properties of the thin films deposited at room temperature were inconspicuous due to their amorphous microstructure which was characterized by x-ray diffraction. To enhance the thermoelectric properties of the thin films, cobalt antimony thin film deposited by sputtering power of 55 W was annealed at various temperatures ranging from 443 K to 593 K. It was found that all the thin films had n-type conductivity and the CoSb$_{3}$ thin films annealed at 493–593 K were polycrystalline with (310) preferential orientation. The Seebeck coefficient of CoSb$_{3}$ thin films annealed at 543 K increased with the raising of the measuring temperature (323–473 K), and the maximum Seebeck coefficient was −88 μV/K, which is the highest value for CoSb$_{3}$ thin films deposited on flexible substrate.
Starting Page	630
Ending Page	635
Page Count	6
File Format	PDF
ISSN	03615235
Journal	Journal of Electronic Materials
Volume Number	44
Issue Number	2
e-ISSN	1543186X
Language	English
Publisher	Springer US
Publisher Date	2014-12-09
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Cobalt antimony thin film sputtering power thermoelectric properties flexible substrate annealing Optical and Electronic Materials Characterization and Evaluation of Materials Electronics and Microelectronics, Instrumentation Solid State Physics
Content Type	Text
Resource Type	Article
Subject	Materials Chemistry Electronic, Optical and Magnetic Materials Condensed Matter Physics Electrical and Electronic Engineering

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