NDLI: Deposition of ZnO Films on Freestanding CVD Thick Diamond Films

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Deposition of ZnO Films on Freestanding CVD Thick Diamond Films

Content Provider	Scilit
Author	Jian, Sun Yi-Zhen, Bai Tian-Peng, Yang Yi-Bin, Xu Xin-Sheng, Wang Guo-Tong, Du Han-Hua, Wu
Copyright Year	2006
Description	Journal: Chinese Physics Letters For ZnO/diamond structured surface acoustic wave (SAW) filters, performance is sensitively dependent on the quality of the ZnO films. In this paper, we prepare highly-oriented and fine grained polycrystalline ZnO thin films with excellent surface smoothness on the smooth nucleation surfaces of freestanding CVD diamond films by metal organic chemical vapour deposition (MOCVD). The properties of the ZnO films are characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM), and photoluminescence (PL) spectrum. The influences of the deposition conditions on the quality of ZnO films are discussed briefly. ZnO/freestanding thick-diamond-film layered SAW devices with high response frequencies are expected to be developed.
Related Links	http://iopscience.iop.org/article/10.1088/0256-307X/23/5/071/pdf
Ending Page	1323
Page Count	3
Starting Page	1321
ISSN	0256307X
e-ISSN	17413540
DOI	10.1088/0256-307x/23/5/071
Journal	Chinese Physics Letters
Issue Number	5
Volume Number	23
Language	English
Publisher	IOP Publishing
Publisher Date	2006-04-28
Access Restriction	Open
Subject Keyword	Journal: Chinese Physics Letters Coatings and Films Deposition of Zno Films Freestanding Cvd Cvd Thick Diamond Films Thick Diamond
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy

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