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Effect of post-deposition annealing on the structural and electrical properties of dc magnetron sputtered $Ta_{2}O_{5}$ films
| Content Provider | Scilit |
|---|---|
| Author | Uthanna, S. Chandra, S. V. J. Reddy, P. S. Rao, G. M. |
| Copyright Year | 2008 |
| Description | Journal: Journal of Physics: Conference Series |
| Related Links | http://iopscience.iop.org/article/10.1088/1742-6596/114/1/012035/pdf |
| ISSN | 17426588 |
| e-ISSN | 17426596 |
| DOI | 10.1088/1742-6596/114/1/012035 |
| Journal | Journal of Physics: Conference Series |
| Volume Number | 114 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2008-05-01 |
| Access Restriction | Open |
| Subject Keyword | Journal: Journal of Physics: Conference Series Applied Physics Thin Film Room Temperature Magnetron Sputtering |
| Content Type | Text |
| Resource Type | Article |
| Subject | Physics and Astronomy |