NDLI: Macroparticles in films deposited by steered cathodic arc

Content Provider	Scilit
Author	Swift, P. D.
Copyright Year	1996
Description	Journal: Journal of Physics D: Applied Physics The macroparticle content of titanium films deposited using a steered vacuum cathodic arc has been investigated. It has been found that the macroparticle number decreases with increasing steering magnetic field strength, and experimental results are found to be consistent with the model in which the number and mass of macroparticles arising from a cathode spot are proportional to the cathode spot volume.
Related Links	http://iopscience.iop.org/article/10.1088/0022-3727/29/7/041/pdf
Ending Page	2031
Page Count	7
Starting Page	2025
ISSN	00223727
e-ISSN	13616463
DOI	10.1088/0022-3727/29/7/041
Journal	Journal of Physics D: Applied Physics
Issue Number	7
Volume Number	29
Language	English
Publisher	IOP Publishing
Publisher Date	1996-07-14
Access Restriction	Open
Subject Keyword	Journal: Journal of Physics D: Applied Physics Coatings and Films Magnetic Field
Content Type	Text
Resource Type	Article
Subject	Surfaces, Coatings and Films Acoustics and Ultrasonics Condensed Matter Physics Electronic, Optical and Magnetic Materials

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Macroparticles in films deposited by steered cathodic arc