NDLI: Stable glow plasma at atmospheric pressure

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Stable glow plasma at atmospheric pressure

Content Provider	Scilit
Author	Kanazawa, S. Kogoma, M. Moriwaki, T. Okazaki, S.
Copyright Year	1988
Description	Journal: Journal of Physics D: Applied Physics A stable glow plasma at atmospheric pressure has been achieved for plasma treatment under selected conditions, for example the structure of electrodes, the kind of dilute gas, and the frequency of power. The surface fluorination of PET film and carbon thin-film deposition by such a plasma is described here. The surface energy can be controlled by plasma treatment of various concentrations $(O_{2}/CF_{4}$/He) in the same way as the lower pressure method that has been reported by Kogoma and co-workers (1987). Active species in plasma are identified by emission spectroscopy.
Related Links	http://iopscience.iop.org/article/10.1088/0022-3727/21/5/028/pdf
Ending Page	840
Page Count	3
Starting Page	838
ISSN	00223727
e-ISSN	13616463
DOI	10.1088/0022-3727/21/5/028
Journal	Journal of Physics D: Applied Physics
Issue Number	5
Volume Number	21
Language	English
Publisher	IOP Publishing
Publisher Date	1988-05-14
Access Restriction	Open
Subject Keyword	Journal: Journal of Physics D: Applied Physics Coatings and Films Condensed Matter Physics Acoustics and Ultrasonics Electronic, Optical and Magnetic Materials Surfaces, Coatings and Films
Content Type	Text
Resource Type	Article
Subject	Surfaces, Coatings and Films Acoustics and Ultrasonics Condensed Matter Physics Electronic, Optical and Magnetic Materials

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