NDLI: In situ deformation measurement on the surface of Si wafers

Content Provider	Scilit
Author	Jarosz, M. Kocsanyi, L. Giber, J.
Copyright Year	1982
Description	Journal: Journal of Physics E: Scientific Instruments An interferometric measuring system which allows the deformation of the surface of silicon wafers during semiconductor production to be continuously monitored is presented. Changes in the sample surface can be measured during manufacture if it can be illuminated through a window and the deformation changes observed by optoelectronic detectors. A measuring arrangement consisting of a minimum number of detectors and based on a Michelson interferometer was constructed for special symmetrical samples.
Related Links	http://iopscience.iop.org/article/10.1088/0022-3735/15/7/013/pdf
Ending Page	748
Page Count	3
Starting Page	746
ISSN	00223735
DOI	10.1088/0022-3735/15/7/013
Journal	Journal of Physics E: Scientific Instruments
Issue Number	7
Volume Number	15
Language	English
Publisher	IOP Publishing
Publisher Date	1982-07-01
Access Restriction	Open
Subject Keyword	Journal: Journal of Physics E: Scientific Instruments Measurement System
Content Type	Text
Resource Type	Article
Subject	Physics and Astronomy Instrumentation Engineering Materials Science

Central Library (ISO-9001:2015 Certified)
Indian Institute of Technology Kharagpur
Kharagpur, West Bengal, India | PIN - 721302

See location in the Map
03222 282435
Mail: support@ndl.gov.in

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

In situ deformation measurement on the surface of Si wafers