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Special issue on surfaces patterned by ion sputtering
| Content Provider | Scilit |
|---|---|
| Author | Munoz-Garcia, Javier Cuerno, Rodolfo Castro, Mario Vázquez, L. Gago, Raul Redondo-Cubero, Andres |
| Copyright Year | 2018 |
| Description | Journal: Journal of Physics: Condensed Matter Scalable nanostructuring of surfaces using ion beam sputtering (IBS) is a versatile alternative to traditional lithography. Semiconductors, metals or compounds are amenable for IBS where different patterns can be obtained by tuning the experimental setup. This special issue addresses this problem in a wide range of topics, from a basic understanding of the physical mechanisms operating at the nanoscale, to practical applications, with a synergetic approach coming from theoretical as well as experimental groups. |
| Related Links | https://e-archivo.uc3m.es/bitstream/10016/29025/1/special_JPCM_2018_ps.pdf http://iopscience.iop.org/article/10.1088/1361-648X/aae608/pdf |
| ISSN | 09538984 |
| e-ISSN | 1361648X |
| DOI | 10.1088/1361-648x/aae608 |
| Journal | Journal of Physics: Condensed Matter |
| Issue Number | 45 |
| Volume Number | 30 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2018-10-04 |
| Access Restriction | Open |
| Subject Keyword | Journal: Journal of Physics: Condensed Matter Ion Beam Sputtering |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics Materials Science |