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Effect of Substrate Miscut on the Direct Growth of Semipolar (10-1-1) GaN on (100) $MgAl_{2}O_{4}$by Metalorganic Chemical Vapor Deposition
| Content Provider | Scilit |
|---|---|
| Author | Kaeding, John F. Iza, Michael Sato, Hitoshi Baars, Steven P. Den Speck, James S. Nakamura, Shuji |
| Copyright Year | 2006 |
| Description | Journal: Japanese Journal of Applied Physics We report on the the direct growth of semipolar (10-1-1) GaN templates on (100) $MgAl_{2}O_{4}$ substrates miscut in the direction. (10-1-1) GaN deposited on nominally on-axis substrates did not coalesce. An intentional substrate miscut broke the four-fold symmetry of the substrate surface and resulted in coalesced layers. The minimum full-width at half maximum (FWHM) of the on-axis (10-1-1) X-ray rocking curve was 0.4° for a 1.5° miscut. The FWHM of the off-axis (000-2) rocking curve remained constant for miscuts <3.0°. 93% and 99% of the volume of the samples were aligned in a single epitaxial variant for 1.5° and 3.0° substrate miscuts, respectively. |
| Related Links | http://iopscience.iop.org/article/10.1143/JJAP.45.L536/pdf |
| Ending Page | L538 |
| Page Count | 3 |
| Starting Page | L536 |
| ISSN | 00214922 |
| e-ISSN | 13474065 |
| DOI | 10.1143/jjap.45.l536 |
| Journal | Japanese Journal of Applied Physics |
| Issue Number | No. 21 |
| Volume Number | 45 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2006-05-26 |
| Access Restriction | Open |
| Subject Keyword | Journal: Japanese Journal of Applied Physics Cultural Studies Substrate Miscut |
| Content Type | Text |
| Resource Type | Article |
| Subject | Physics and Astronomy Engineering |
