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Thermally induced micro-defects in CZ silicon: a high resolution electron microscopy study
| Content Provider | Scilit |
|---|---|
| Author | Ponce, Fernando Hahn, S. Yamashita, T. Scott, M. Carruthers, J. R. |
| Copyright Year | 2020 |
| Description | Book Name: Microscopy of Semiconducting Materials, 1983 |
| Related Links | https://content.taylorfrancis.com/books/download?dac=C2006-0-01873-7&isbn=9781003069614&doi=10.1201/9781003069614-10&format=pdf |
| Ending Page | 70 |
| Page Count | 6 |
| Starting Page | 65 |
| DOI | 10.1201/9781003069614-10 |
| Language | English |
| Publisher | Informa UK Limited |
| Publisher Date | 2020-11-25 |
| Access Restriction | Open |
| Subject Keyword | Book Name: Microscopy of Semiconducting Materials, 1983 Microscopic Research Microdefects |
| Content Type | Text |
| Resource Type | Chapter |