NDLI: Porous Silicon in Micromachining Hotplates Aimed for Sensor Applications

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Porous Silicon in Micromachining Hotplates Aimed for Sensor Applications

Content Provider	Scilit
Copyright Year	2016
Description	In all those applications, the thermal properties of the sensing elements determine the functional operation. In order to operate thermal sensors and actuators efficiently, it is necessary to produce maximum temperature changes from a minimum amount of input energy. It should be noted that minimizing power consumption is one of the main requirements for sensor technology, especially when the devices are intended for use in portable systems. For example,conventional combustive and semiconductive oxide gas sensors, which operate at elevated temperatures between 300 and 600°C, typically consume 0.2-1.0 W, while the single sensing element aimed for application in portable devices must have a power dissipation of less than 10-50 mW. The use of thermal microstructures having small heat capacitance with a high degree of thermal insulation gives the possibility to resolve this problem. Therefore, incorporation of thermally isolated micro hotplates in the construction of the indicated devices allows reducing considerably both the power consumption and the thermal transient time. Book Name: Porous Silicon: From Formation to Application: Biomedical and Sensor Applications, Volume Two
Related Links	https://api.taylorfrancis.com/content/chapters/edit/download?identifierName=doi&identifierValue=10.1201/b19205-19&type=chapterpdf
Ending Page	238
Page Count	16
Starting Page	223
DOI	10.1201/b19205-19
Language	English
Publisher	Informa UK Limited
Publisher Date	2016-01-05
Access Restriction	Open
Subject Keyword	Book Name: Porous Silicon: From Formation To Application: Biomedical and Sensor Applications, Volume Two Sensors Thermal Portable Hotplates Functional Devices Sensing Elements Power Consumption
Content Type	Text
Resource Type	Chapter

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