NDLI: Low Voltage Scanning Electron Microscopy

Content Provider	Scilit
Author	Joy, David C. Newbury, Dale E.
Copyright Year	2002
Description	Low Voltage Scanning Electron Microscopy (LVSEM), defined as operation in the energy range below 5 keV, has become perhaps the most important single operational mode of the SEM. This is because the LVSEM offers advantages in the imaging of surfaces, in the observation of poorly conducting and insulating materials, and for high spatial resolution X-ray microanalysis. These benefits all occur because a reduction in the energy $E_{o}$ of the incident beam leads to a rapid fall in the range R of the electrons since R ∼k.E_{0}$^{1.66}$. The reduction in the penetration of the beam has important consequences.
Related Links	https://www.cambridge.org/core/services/aop-cambridge-core/content/view/3389D847D10AB8AF7F931E1E04C01B54/S1551929500057813a.pdf/div-class-title-low-voltage-scanning-electron-microscopy-div.pdf
Ending Page	23
Page Count	2
Starting Page	22
ISSN	15519295
e-ISSN	21503583
DOI	10.1017/s1551929500057813
Journal	Microscopy Today
Issue Number	2
Volume Number	10
Language	English
Publisher	Cambridge University Press (CUP)
Publisher Date	2002-03-01
Access Restriction	Open
Subject Keyword	Microscopy Today Microscopic Research
Content Type	Text
Resource Type	Article

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Low Voltage Scanning Electron Microscopy