Please wait, while we are loading the content...
| Content Provider | Royal Society of Chemistry (RSC) |
|---|---|
| Author | Zheng, Li Zhang, Dongliang Shen, Lingyan Cheng, Xinhong Li, Jingjie Wang, Qian Qian, Ru Yu, Yuehui |
| Copyright Year | 2017 |
| Abstract | In this paper, AlNO nano-films have been deposited on an AlGaN/GaN heterojunction by alternating growth of AlN and Al2O3 using plasma enhanced atomic layer deposition (PEALD). With optimized AlN layer insertion in Al2O3, the oxygen is effectively blocked from diffusing to the AlGaN surface and the formation of detrimental Ga–O bonds is significantly suppressed. Owing to the negative fixed charges in Al2O3, provided by the incorporated nitrogen, the flat band voltage (Vfb) of the AlNO/AlGaN/GaN metal–insulator–semiconductor (MIS) diode exhibits a positive shift of 1.50 V, compared with the Al2O3/AlGaN/GaN MIS diode. Markedly reduced hysteresis and frequency-dispersion in the C–V characteristics have also been observed at the AlNO/AlGaN interface. Furthermore, the interface states density (Nit) at the AlNO/AlGaN interface has been reduced by one order of magnitude compared with the Nit at the Al2O3/AlGaN interface, and the border traps density (Nbt) near the AlNO/AlGaN interface is also identified to be reduced by the insertion of AlN layers into Al2O3. The PEALD induced optimization of AlNO deposition on the AlGaN/GaN heterojunction provides a pathway to the fabrication of AlGaN/GaN high electron mobility transistors (HEMTs) with low interface trap density. |
| Starting Page | 11745 |
| Ending Page | 11751 |
| Page Count | 7 |
| File Format | HTM / HTML PDF |
| ISSN | 20462069 |
| Volume Number | 7 |
| Issue Number | 19 |
| Journal | RSC Advances |
| DOI | 10.1039/c6ra27190a |
| Language | English |
| Publisher | Royal Society of Chemistry |
| Access Restriction | Open |
| Subject Keyword | Oxygen Atomic layer deposition Diode Marine isotope stage Electron mobility Nitrogen Gallium nitride Mathematical optimization Hysteresis Aluminium gallium nitride Heterojunction |
| Content Type | Text |
| Resource Type | Article |
| Subject | Chemistry Chemical Engineering |
National Digital Library of India (NDLI) is a virtual repository of learning resources which is not just a repository with search/browse facilities but provides a host of services for the learner community. It is sponsored and mentored by Ministry of Education, Government of India, through its National Mission on Education through Information and Communication Technology (NMEICT). Filtered and federated searching is employed to facilitate focused searching so that learners can find the right resource with least effort and in minimum time. NDLI provides user group-specific services such as Examination Preparatory for School and College students and job aspirants. Services for Researchers and general learners are also provided. NDLI is designed to hold content of any language and provides interface support for 10 most widely used Indian languages. It is built to provide support for all academic levels including researchers and life-long learners, all disciplines, all popular forms of access devices and differently-abled learners. It is designed to enable people to learn and prepare from best practices from all over the world and to facilitate researchers to perform inter-linked exploration from multiple sources. It is developed, operated and maintained from Indian Institute of Technology Kharagpur.
Learn more about this project from here.
NDLI is a conglomeration of freely available or institutionally contributed or donated or publisher managed contents. Almost all these contents are hosted and accessed from respective sources. The responsibility for authenticity, relevance, completeness, accuracy, reliability and suitability of these contents rests with the respective organization and NDLI has no responsibility or liability for these. Every effort is made to keep the NDLI portal up and running smoothly unless there are some unavoidable technical issues.
Ministry of Education, through its National Mission on Education through Information and Communication Technology (NMEICT), has sponsored and funded the National Digital Library of India (NDLI) project.
| Sl. | Authority | Responsibilities | Communication Details |
|---|---|---|---|
| 1 | Ministry of Education (GoI), Department of Higher Education |
Sanctioning Authority | https://www.education.gov.in/ict-initiatives |
| 2 | Indian Institute of Technology Kharagpur | Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project | https://www.iitkgp.ac.in |
| 3 | National Digital Library of India Office, Indian Institute of Technology Kharagpur | The administrative and infrastructural headquarters of the project | Dr. B. Sutradhar bsutra@ndl.gov.in |
| 4 | Project PI / Joint PI | Principal Investigator and Joint Principal Investigators of the project |
Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon |
| 5 | Website/Portal (Helpdesk) | Queries regarding NDLI and its services | support@ndl.gov.in |
| 6 | Contents and Copyright Issues | Queries related to content curation and copyright issues | content@ndl.gov.in |
| 7 | National Digital Library of India Club (NDLI Club) | Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach | clubsupport@ndl.gov.in |
| 8 | Digital Preservation Centre (DPC) | Assistance with digitizing and archiving copyright-free printed books | dpc@ndl.gov.in |
| 9 | IDR Setup or Support | Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops | idr@ndl.gov.in |
|
Loading...
|