NDLI: High sensitivity humidity sensors using flexible surface acoustic wave devices made on nanocrystalline ZnO/polyimide substrates

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Journal of Materials Chemistry C Vol - 1 Issue - 29

Journal of Materials Chemistry C Vol - 1 Issue - 19

Journal of Materials Chemistry C Vol - 1 Issue - 9

Journal of Materials Chemistry C Vol - 1 Issue - 8

Journal of Materials Chemistry C Vol - 1 Issue - 7

Journal of Materials Chemistry C Vol - 1 Issue - 6

Journal of Materials Chemistry C Vol - 1 Issue - 5

High sensitivity humidity sensors using flexible surface acoustic wave devices made on nanocrystalline ZnO/polyimide substrates

Content Provider	Royal Society of Chemistry (RSC)
Author	Xuan, W. P. Li, D. J. Wang, W. B. Dong, S. R. Jin, H. Luo, J. K. He, X. L. Zhou, J.
Copyright Year	2013
Abstract	Flexible ZnO/polyimide surface acoustic wave (SAW) based humidity sensors were fabricated and their performances were investigated. ZnO films deposited on polyimide substrates are (0002) oriented columnar nanocrystals with grain sizes of 50–60 nm. SAW devices with different wavelengths showed high transmission performance, and the sensors exhibited a good repeatability in response to the cyclic change in humidity from ∼5% relative humidity (RH) to ∼87% RH. The responses of the sensors to RH change increase with the increase in humidity. The sensitivity increases with the decrease in wavelength owing to the improved characteristics of the sensors with shorter wavelengths. A high sensitivity of 34.7 kHz/10% RH has been obtained from a SAW sensor with no surface treatment, demonstrating that the flexible SAW humidity sensors are very promising for applications in flexible sensors and microsystems.
Starting Page	6210
Ending Page	6215
Page Count	6
File Format	HTM / HTML PDF
ISSN	20507526
Volume Number	1
Issue Number	39
Journal	Journal of Materials Chemistry C
DOI	10.1039/c3tc31126k
Language	English
Publisher	Royal Society of Chemistry
Access Restriction	Open
Subject Keyword	Polyimide Surface acoustic wave Humidity Relative humidity Wavelength
Content Type	Text
Resource Type	Article
Subject	Chemistry Materials Chemistry

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