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Micromachining of High Quality PMN–31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications
| Content Provider | MDPI |
|---|---|
| Author | Lei, Zhihong Chen, Yan Xu, Guisheng Liu, Jinfeng Yuan, Maodan Zeng, Lvming Ji, Xuanrong Wu, Dawei |
| Copyright Year | 2020 |
| Description | A decrease of piezoelectric properties in the fabrication of ultra-small Pb(Mg1/3Nb2/3)–x%PbTiO3 (PMN–x%PT) for high-frequency (>20 MHz) ultrasonic array transducers remains an urgent problem. Here, PMN–31%PT with micron-sized kerfs and high piezoelectric performance was micromachined using a 355 nm laser. We studied the kerf profile as a function of laser parameters, revealing that micron-sized kerfs with designated profiles and fewer micro-cracks can be obtained by optimizing the laser parameters. The domain morphology of micromachined PMN–31%PT was thoroughly analyzed to validate the superior piezoelectric performance maintained near the kerfs. A high piezoresponse of the samples after micromachining was also successfully demonstrated by determining the effective piezoelectric coefficient (d33*~1200 pm/V). Our results are promising for fabricating superior PMN–31%PT and other piezoelectric high-frequency (>20 MHz) ultrasonic array transducers. |
| Starting Page | 512 |
| e-ISSN | 2072666X |
| DOI | 10.3390/mi11050512 |
| Journal | Micromachines |
| Issue Number | 5 |
| Volume Number | 11 |
| Language | English |
| Publisher | MDPI |
| Publisher Date | 2020-05-19 |
| Access Restriction | Open |
| Subject Keyword | Micromachines Telecommunications Laser Micromachining Pmn–31%pt Single Crystals High-frequency Transducer Micron-sized Kerf Piezoelectric Performance Ferroelectric Domain Piezoelectric Coefficient |
| Content Type | Text |
| Resource Type | Article |
