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Flexible SAW Microfluidic Devices as Wearable pH Sensors Based on ZnO Nanoparticles
| Content Provider | MDPI |
|---|---|
| Author | Piro, Luigi Lamanna, Leonardo Guido, Francesco Balena, Antonio Mariello, Massimo Rizzi, Francesco Vittorio, Massimo De |
| Copyright Year | 2021 |
| Description | In this work, a new flexible and biocompatible microfluidic pH sensor based on surface acoustic waves (SAWs) is presented. The device consists of polyethylene naphthalate (PEN) as a flexible substrate on which aluminum nitride (AlN) has been deposited as a piezoelectric material. The fabrication of suitable interdigitated transducers (IDTs) generates Lamb waves (L-SAW) with a center frequency ≈500 MHz traveling in the active region. A SU-8 microfluidics employing ZnO nanoparticles (NPs) functionalization as a pH-sensitive layer is fabricated between the IDTs, causing a shift in the L-SAW resonance frequency as a function of the change in pH values. The obtained sensitivity of ≈30 kHz/pH from pH 7 to pH 2 demonstrates the high potential of flexible SAW devices to be used in the measurement of pH in fluids and biosensing. |
| Starting Page | 1479 |
| e-ISSN | 20794991 |
| DOI | 10.3390/nano11061479 |
| Journal | Nanomaterials |
| Issue Number | 6 |
| Volume Number | 11 |
| Language | English |
| Publisher | MDPI |
| Publisher Date | 2021-06-03 |
| Access Restriction | Open |
| Subject Keyword | Nanomaterials Analytical Chemistry Saw Wearable Device Flexible Biosensor Pen Ph Zno Nanoparticles |
| Content Type | Text |
| Resource Type | Article |
