NDLI: Hardness, Young's Modulus and Elastic Recovery in Magnetron Sputtered Amorphous $AlMgB_{14}$ Films

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Hardness, Young's Modulus and Elastic Recovery in Magnetron Sputtered Amorphous $AlMgB_{14}$ Films

Content Provider	MDPI
Author	Grishin, Alexander M.
Copyright Year	2020
Description	We report optical and mechanical properties of hard aluminum magnesium boride films magnetron sputtered from a stoichiometric $AlMgB_{14}$ ceramic target onto $Corning^{®}$ 1737 Glass and Si (100) wafers. High target sputtering rf-power and sufficiently short target-to-substrate distance appeared to be critical processing conditions. Amorphous $AlMgB_{14}$ films demonstrate very strong indentation size effect (ISE): exceptionally high nanohardness H = 88 GPa and elastic Young’s modulus $E$ = 517 GPa at 26 nm of the diamond probe penetration depth and almost constant values, respectively, of about 35 GPa and 275 GPa starting at depths of about 2–3% of films’ thickness. For comparative analysis of elastic strain to failure index $H/E$ , resistance to plastic deformation ratio $H3/E2$ and elastic recovery ratio $We$ were obtained in nanoindentation tests performed in a wide range of loading forces from 0.5 to 40 mN. High authentic numerical values of H = 50 GPa and $E$ = 340 GPa correlate with as low as only 10% of total energy dissipating through the plastic deformations.
Starting Page	823
e-ISSN	20734352
DOI	10.3390/cryst10090823
Journal	Crystals
Issue Number	9
Volume Number	10
Language	English
Publisher	MDPI
Publisher Date	2020-09-16
Access Restriction	Open
Subject Keyword	Crystals Coatings and Films Optical Refractive Index and Extinction Coefficient Raman Icosahedral Boron–boron Vibrations Elastic and Plastic Energies Hardness Young's Modulus
Content Type	Text
Resource Type	Article

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