Loading...
Please wait, while we are loading the content...
Similar Documents
Calculation of the Absorbed Electron Energy 3D Distribution by the Monte Carlo Method, Presentation of the Proximity Function by Three Parameters α, β, η and Comparison with the Experiment
| Content Provider | MDPI |
|---|---|
| Author | Svintsov, Alexander A. Knyazev, Maxim A. Zaitsev, Sergey I. |
| Copyright Year | 2022 |
| Description | The paper presents a program for simulating electron scattering in layered materials ProxyFn. Calculations show that the absorbed energy density is three-dimensional, while the contribution of the forward-scattered electrons is better described by a power function rather than the commonly used Gaussian. It is shown that for the practical correction of the proximity effect, it is possible, nevertheless, to use the classical two-dimensional proximity function containing three parameters: α, β, η. A method for determining the parameters α, β, η from three-dimensional calculations based on MC simulation and development consideration is proposed. A good agreement of the obtained parameters and experimental data for various substrates and electron energies is shown. Thus, a method for calculating the parameters of the classical proximity function for arbitrary layered substrates based on the Monte Carlo simulation has been developed. |
| Starting Page | 3888 |
| e-ISSN | 19961944 |
| DOI | 10.3390/ma15113888 |
| Journal | Materials |
| Issue Number | 11 |
| Volume Number | 15 |
| Language | English |
| Publisher | MDPI |
| Publisher Date | 2022-05-30 |
| Access Restriction | Open |
| Subject Keyword | Materials Electron-beam Lithography Monte Carlo Method Proximity Function Electrons Scattering |
| Content Type | Text |
| Resource Type | Article |
