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| Content Provider | IET Digital Library |
|---|---|
| Author | Wu, Tianshu Chen, Shuyu Wu, Peng Nie, Shaozhong |
| Abstract | There are generally zero drift, sensitivity drift and nonlinear error in silicon piezoresistive pressure sensors due to the inherent characteristics of semiconductor materials. It is necessary to compensate and correct the errors produced so as to meet the requirements of measurement accuracy. In order to further improve the compensation precision, based on the research of various basic software compensation methods, a surface fitting compensation algorithm based on least square method is designed, and the software is implemented on the Visual Basic platform. The experimental results show that the zero drift, sensitivity drift and nonlinear error is effectively eliminated, and the output precision of the sensor is greatly improved. |
| Starting Page | 748 |
| Ending Page | 753 |
| Page Count | 6 |
| ISSN | 10224653 |
| Volume Number | 28 |
| e-ISSN | 20755597 |
| Issue Number | Issue 4, Jul (2019) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/cje/28/4 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/cje.2019.05.001 |
| Journal | Chinese Journal of Electronics |
| Publisher Date | 2019-07-01 |
| Access Restriction | Open |
| Rights Holder | © Chinese Institute of Electronics |
| Subject Keyword | Basic Software Compensation Method Compensation Compensation Precision Error Compensation Generally Zero Drift High Precision Software Compensation Algorithm Inherent Characteristic Interpolation And Function Approximation Least Squares Approximation Nonlinear Error Numerical Analysis Numerical Approximation And Analysis Output Precision Piezoresistive Device Pressure And Vacuum Measurement Pressure Sonsor Semiconductor Material Sensing And Detecting Device Sensing Device And Transducers Sensitivity Drift Silicon Silicon Piezoresistive Pressure Sensor Statistics Surface Fitting Visual BASIC |
| Content Type | Text |
| Resource Type | Article |
| Subject | Applied Mathematics Electrical and Electronic Engineering |
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