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| Content Provider | IET Digital Library |
|---|---|
| Author | Hayati, Mohsen Fathipour, Morteza Vaziri, Hamid Sherafat |
| Abstract | A novel structure for piezoresistive pressure sensors is proposed. The structure comprises two piezo-resistors, one mounted on a flat diaphragm and the other mounted outside of the diaphragm so that a hairpin-shaped structure is formed. As a result, one of the piezo-resistors will be affected by the input pressure and the other one will not. Also an inverting Operational Amplifier (OP-AMP) amplifier is utilised. The proposed pressure sensor can be designed using both square diaphragm or circular diaphragm and it has the advantage of higher linearity for input pressure range of 1 MPa in comparison with conventional structures. The value of nonlinearity (NL) is decreased from 0.5515% full-scale (FS), for the conventional sensor, to 0.1138% FS (for the proposed sensor with square diaphragm) and 0.0761% FS (for the proposed sensor with circular diaphragm), which shows an improvement in reducing NL about 80% in square diaphragm and about 86% when circular diaphragm is employed. The proposed structure is analysed and simulated using COMSOL multiphysics software. |
| Starting Page | 1046 |
| Ending Page | 1051 |
| Page Count | 6 |
| Volume Number | 13 |
| e-ISSN | 17500443 |
| Issue Number | Issue 7, Jul (2018) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/13/7 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2018.0149 |
| Journal | Micro & Nano Letters |
| Publisher Date | 2018-07-01 |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Amplifiers Circular Diaphragm COMSOL Multiphysics Software Diaphragms Flat Diaphragm Hairpin Piezoresistive Pressure Sensor OP-AMP Amplifier Operational Amplifier Piezoelectric Device Piezoresistors Pressure And Vacuum Measurement Pressure Measurement Pressure Sonsor Resistor Sensing Device And Transducers Square Diaphragm |
| Content Type | Text |
| Resource Type | Article |
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