NDLI: Investigation of displacement measurement method based on fringing field capacitor

Content Provider	IET Digital Library
Author	Wang, Wenlian Wang, Wenxia Liu, Zhe
Abstract	Capacitive fringing field sensors have been used in some non-contact detections. A lateral displacement measurement method based on fringing field capacitors is investigated by simulations and experiments in this study. For the conventional interdigitated structure, the periodic electric field distribution is obtained because of those alternate electrodes, which produces periodic capacitances along with the target displacement. However, it is inconvenient to construct measurement systems due to the non-linear capacitance output. A dentate structure is proposed to improve the output characteristics of displacement measurement. The periodic uniform electric field is achieved by the dentate electrodes, which brings the linear capacitance variation in every period. Indium–tin oxide film was employed to fabricate a prototype, and the experiment results indicate that the dentate structure can be used in the lateral displacement measurement for its linear output characteristics.
Starting Page	63
Ending Page	66
Page Count	4
ISSN	17518822
Volume Number	11
e-ISSN	17518830
Issue Number	Issue 1, Jan (2017)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/iet-smt/11/1
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/iet-smt.2016.0187
Journal	IET Science, Measurement & Technology
Publisher Date	2017-01-01
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	Capacitance Measurement Capacitive Fringing Field Sensor Capacitive Sensor Capacitor Dentate Structure Displacement Measurement Electrode Fringing Field Capacitor Impedance And Admittance Measurement Indium Compound Interdigitated Structure ITO Lateral Displacement Measurement Method Linear Capacitance Variation Measurement of Basic Electric And Magnetic Variables Nonlinear Capacitance Output Periodic Capacitance Periodic Electric Field Distribution Periodic Uniform Electric Field Sensing And Detecting Device Sensing Device And Transducers Spatial Variables Measurement Thin Film Sonsor
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Electrical and Electronic Engineering

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