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| Content Provider | IET Digital Library |
|---|---|
| Author | Zhu, Xifeng Xing, Jianchun Xie, Liqiang Wang, Tianxian |
| Abstract | Instead of a conventional wireless transceiver system that requires batteries and complex circuits, the surface acoustic wave (SAW) sensor enables wireless passive measurement. A sensor consisting of an SAW device and external impedance sensing element is analysed. Since the reflection coefficient of the reflective grating on the SAW device depends on the load impedance, the echo characteristics are influenced by the change in the impedance of external sensing element. A resistance sensor or a capacitive sensor is selected as the external sensing element. The two different types of sensors are simulated using coupling-of-mode (COM) modelling, and the relationships between amplitude and phase with load impedance are analysed. On the basis of COM theory, a wireless impedance-loaded SAW sensor is fabricated by the lift-off process and tested by a network analyser to verify the simulation results. It is observed that the test results agree well with the simulation results. The phase change is more sensitive than the amplitude based on the results obtained. The sensitivity is 0.274°/Ω for the sensor with resistance and the sensitivity of the sensor with capacitance is 1.096°/pF. These results can guide the design of the high sensitivity impedance-loaded SAW sensors in the future. |
| Starting Page | 534 |
| Ending Page | 537 |
| Page Count | 4 |
| Volume Number | 14 |
| e-ISSN | 17500443 |
| Issue Number | Issue 5, May (2019) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/14/5 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2018.5375 |
| Journal | Micro & Nano Letters |
| Publisher | The Institution of Engineering and Technology |
| Publisher Date | 2019-05-01 |
| Access Restriction | Open |
| Rights License | Creative Commons Attribution-No Derivs License (http://creativecommons.org/licenses/by-nd/3.0/) |
| Subject Keyword | Acoustic Wave Device Capacitive Sensor COM Modelling Coupling-of-mode Modelling Diffraction Gratings Electric Impedance Measurement External Impedance Sensing Element Impedance And Admittance Measurement Lift-off Process Network Analyser Reflective Grating Resistance Sensor Sensing Device And Transducers Sonic And Ultrasonic Transducers Surface Acoustic Wave Sensor Surface Acoustic Wave Sonsor Wireless Impedance-loaded SAW Sensor Device Wireless Passive Measurement Wireless Sensor Network Wireless Transceiver System |
| Content Type | Text |
| Resource Type | Article |
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