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| Content Provider | IET Digital Library |
|---|---|
| Author | Wang, Hairong Wang, Jiaxin Chen, Lei Yao, Yuqing Sun, Quantao Qunming, Zhang |
| Abstract | An integrated microoxygen sensor based on the nanostructured TiO2 thin film is presented. A pair of interdigitated electrodes was designed with the microheater around them on the same layer, which was aimed at simplifying the structure and avoiding fracture of the embedded heater. To fabricate the sensor chips, an optimisation process consisting of 14 steps was designed. The adiabatic cavity was formed by releasing the Si substrate from backside to a certain thickness at first, then a TiO2 film was prepared by the sol–gel process and patterned by the wet etching process, after that electrodes and the heater were patterned and finally the remaining silicon was thinned further. Response properties to different gases were tested, and the sensor shows a good sensitivity of 0.093 and high selectivity of 0.258 to O2 than H2, response time of 51 s and hysteresis of 2.93%. The integrated microoxygen sensor has potential applications on the occasions of miniaturised, integrated, low power and mass production. |
| Starting Page | 597 |
| Ending Page | 602 |
| Page Count | 6 |
| Volume Number | 10 |
| e-ISSN | 17500443 |
| Issue Number | Issue 10, Oct (2015) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/10/10 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2015.0111 |
| Journal | Micro & Nano Letters |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Adiabatic Cavity Chemical Sensor Deposition from Liquid Phase (melts And Solutions) Electrode Etching Gas Sonsor Integrated Microoxygen Sensor Interdigitated Electrodes Microheater Micromechanical And Nanomechanical Device And System Microsensors And Nanosensors MIS Structure Nanosensor Nanostructured Material Nanostructured Thin Film O2 Optimisation Oxygen Response Property Semiconductor Technology Semiconductor Thin Film Sensor Chips Sol Gel Processing Sol–gel Process Surface Topography Measurement Surface Treatment And Coating Technique TiO2 Titanium Compound Wet Etching |
| Content Type | Text |
| Resource Type | Article |
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