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| Content Provider | IET Digital Library |
|---|---|
| Author | Murakami, Sunao Ishihara, Daisuke Araki, Masateru Ohira, Naoto Ito, Takahiro Horie, Tomoyoshi |
| Abstract | The authors have designed and microfabricated millimetre-scale wing-shaped hybrid microstructures composed of rigid structures of single crystal silicon (SCS) substrates and flexible polyimide (PI) membranes. The wing-shaped microstructures mimicking insect flapping flight have been newly designed using a fluid-structure interaction analysis, and the hybrid microstructures based on the design method have been successfully microfabricated using a simple process flow with SCS substrates coated with PI membranes. Shape of the SCS parts in the hybrid microstructures have been successfully fabricated using deep reactive ion etching of the SCS substrate with small etching rate, and the wing plates of PI membranes have been prepared with the photolithography and the curing processes. The flexibility of the PI membranes of the fabricated hybrid microstructures was also confirmed using the bending test of the PI membranes. |
| Starting Page | 913 |
| Ending Page | 915 |
| Page Count | 3 |
| Volume Number | 12 |
| e-ISSN | 17500443 |
| Issue Number | Issue 11, Nov (2017) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/mnl/12/11 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/mnl.2017.0428 |
| Journal | Micro & Nano Letters |
| Publisher Date | 2017-11-01 |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Bending Test Crystal Microstructure Curing Deep Reactive Ion Etching Dialysis Electro Osmosis Elemental Semiconductor Etching Rate Film And Membrane Processes Flexible Polyimide Membranes Fluid-structure Interaction Analysis Ion Exchange Lithography Membranes Method of Preparation of Material Microfabrication Microstructure Millimetre-scale Wing-shaped Hybrid MicroStructure Organic-inorganic Hybrid Material Osmosis Photolithography Polymer Rigid Silicon Rigid Structure Semiconductor Technology Silicon Single Crystal Silicon Substrates Sputter Etching Surface Topography Measurement Surface Treatment And Coating Technique |
| Content Type | Text |
| Resource Type | Article |
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