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| Content Provider | IET Digital Library |
|---|---|
| Author | Li, Ying Song, Zhitang Liu, Bo Wu, Guanping Feng, Songlin |
| Abstract | To reduce the reset current for developing reliable high-density phase change random access memory, small bottom electrode contact (BEC) size formation is a critical process. One of the failure modes for the process is the corrosion of the tungsten (W) plug, which is caused by the W chemical mechanical polisher (CMP) process. An ultra-smooth surface of BEC nanoscale W plug structure was successfully fabricated by the CMP process, which reduced the W/phase change material (Ge2Sb2Te5, GST) contact resistance, and gained more homogeneous resistance distribution. Thus, the stability of the device was improved greatly by the acidic buff CMP process compared with that of the device with alkali buff owing to the reduction of W/GST connect resistance fluctuation. |
| Starting Page | 747 |
| Ending Page | 749 |
| Page Count | 3 |
| ISSN | 00135194 |
| Volume Number | 49 |
| e-ISSN | 1350911X |
| Issue Number | Issue 12, Jun (2013) |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/el/49/12 |
| Alternate Webpage(s) | https://digital-library.theiet.org/content/journals/10.1049/el.2013.0985 |
| Journal | Electronics Letters |
| Access Restriction | Open |
| Rights Holder | © The Institution of Engineering and Technology |
| Subject Keyword | Antimony Compounds BEC Nanoscale W Plug Structure BEC Size Formation Chemical Mechanical Polisher Process Chemical Mechanical Polishing CMP Process Contact Resistance Corrosion Corrosion Protection Electrical Contacts Electrochemical Electrodes Failure Analysis Failure Mode Ge2Sb2Te5 Germanium Compound GST Homogeneous Resistance Distribution Memory Circuit Phase Change Material Phase Change Memories Phase Change Random Access Memory Reliability Semiconductor Storage Semiconductor Technology Small Bottom Electrode Contact Surface Topography Measurement Switching Operation Ultra-smooth Surface |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electrical and Electronic Engineering |
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