NDLI: Enabling PZT bimorph actuator with passive polysilicon structure

Content Provider	IET Digital Library
Author	Chen, S. H. Michael, A. Kwok, C. Y.
Abstract	For the first time, a bimorph thin film lead zirconate titanate (PZT) micro-actuator with thick polysilicon as a passive structural layer is reported. A simple micro-cantilever actuator consisting of 1000 µm long and 250 µm wide with 4 µm thick polysilicon structure flanked by a piezoelectric active layer on the top and bottom side has been fabricated to demonstrate such novel bimorph configuration. The actuator displays a flat profile with only 2 µm of tip deflection which indicates a balanced stress distribution in the structure. It is driven alternatively in both directions, demonstrating its unique suitability for micro-actuation mechanisms where a passive structural layer is required to enhance the mechanical performance and reliability of the system. The static and dynamic measurements show similar characteristics for the top and bottom actuation. The actuator has a measured resonance frequency of 6.3 kHz, and displacement voltage sensitivities of 17.9 and 25.6 nm/V in the upward and downward direction, respectively.
Starting Page	1373
Ending Page	1375
Page Count	3
ISSN	00135194
Volume Number	53
e-ISSN	1350911X
Issue Number	Issue 20, Sep (2017)
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/el/53/20
Alternate Webpage(s)	https://digital-library.theiet.org/content/journals/10.1049/el.2017.2714
Journal	Electronics Letters
Publisher Date	2017-09-11
Access Restriction	Open
Rights Holder	© The Institution of Engineering and Technology
Subject Keyword	Balanced Stress Distribution Bimorph Thin Film Lead Zirconate Titanate Microactuator Cantilevers Displacement Voltage Sensitivity Dynamic Measurement Elemental Semiconductor Fabrication of MEMS And NEMS Device Lead Compound Mechanical Performance Enhancement Microactuators Microcantilever Actuator Passive Polysilicon Structure Passive Structural Layer Piezoelectric Active Layer Piezoelectric Actuators Piezoelectric Device PZT PZT Bimorph Actuator Reliability Silicon Static Measurement System Reliability Thick Polysilicon Thin Film Device Zirconium Compound
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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