NDLI: High Frequency SU-8 Based Transmission Line for 3-D Millimeter-wave Antennas

Content Provider	IEEE Xplore Digital Library
Author	Sae-Won Lee Parameswaran, A.M. Vaughan, R.G. Mahanfar, A.
Copyright Year	2009
Description	Author affiliation: Institute of Micromachine and Microfabrication Research, School of Engineering Science, Simon Fraser University, Burnaby, British Colombia, V5A 1S6, Canada (Parameswaran, A.M.) \|\| Institute of Micromachine and Microfabrication Research, School of Engineering Science, Simon Fraser University, Burnaby, British Colombia, V5A 1S6, Canada. sleex@sfu.ca (Sae-Won Lee) \|\| Communications Research Group, School of Engineering Science, Simon Fraser University, Burnaby, British Colombia, V5A 1S6, Canada (Vaughan, R.G.; Mahanfar, A.)
Abstract	A fabrication method and characterization of transmission lines for 3-D millimeter-wave antennas are presented using a polymer micro-electro-mechanical-systems (MEMS) fabrication process. The fabrication process steps are performed at low temperatures and are compatible for on-chip CMOS integration. Blanket metal deposition is applied to the wafer to coat the structures with Au and Cr and electrical isolation is achieved by anchor designs.
Starting Page	101
Ending Page	104
File Size	4281034
Page Count	4
File Format	PDF
ISBN	9781424427420
DOI	10.1109/IMWS.2009.4814918
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-02-19
Publisher Place	Mexico
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Micromechanical devices Gold Temperature Transmission lines Millimeter wave technology Microelectromechanical devices Chromium Frequency CMOS process Polymers Transmission line antennas
Content Type	Text
Resource Type	Article

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