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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Chung, M. Hung-Yi Lin Jen-Hui Tsai Chin-Chen Chu |
| Copyright Year | 2008 |
| Description | Author affiliation: Mech. & Syst. Res. Labs., Ind. Technol. Res. Inst., Hsinchu (Hung-Yi Lin; Jen-Hui Tsai) || Dept. of Anesthesiology, Chi-Mei Med. Center, Tainan (Chin-Chen Chu) || Dept. of Electron. Eng., Southern Taiwan Univ., Tainan (Chung, M.) |
| Abstract | Atmospheric pressure plasma (APP) is gaining many grounds in surface modification, photo resist cleaning, medical instrument decontamination, and air pollution control. Previous simulation results were performed mostly with fluid simulations, in which potential profile, electron temperature, and plasma chemistry are available, but lack the details in field emission, secondary electrons, and space charge effect which is important in high pressure plasma. On the other hand, Particle-In-Cell simulation is time consuming. We try to perform a simulation on APP source with MAGIC code, and direct the plasma towards a surface that is to be modified and observe the effect of applied voltage, flow speed, field emission, secondary electrons, Electron Energy Distribution Function (EEDF) and ion temperature. We separate these effects into different simulations, and plasma chemistry is ignored. Simulation results indicate just these particle simulation can reveal many useful insight into operations of an APP source on surface. |
| Starting Page | 346 |
| Ending Page | 349 |
| File Size | 423479 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424415342 |
| DOI | 10.1109/IPMC.2008.4743655 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-05-27 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | atmospheric pressure plasma particle-in-cell Atmospheric modeling Medical simulation Surface contamination surface modification Plasma sources Plasma chemistry Atmospheric-pressure plasmas Plasma simulation plasma simulation Resists fluid Electron emission Plasma temperature |
| Content Type | Text |
| Resource Type | Article |
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