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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Wang Cong-fei Wang Guang-long Chen Jian-hui Dun Yi |
| Copyright Year | 2009 |
| Description | Author affiliation: Institute of Nanotechnology and Microsystems, College of Mechanical Engineering, Shijiazhuang, Hebei Province, China (Wang Cong-fei; Wang Guang-long; Chen Jian-hui; Dun Yi) |
| Abstract | This paper describes the Microelectromechanical Systems (MEMS) optical fiber pressure sensor signal interrogation systems. The white-light interferometry system, component test system (CTS) and self-calibrated interferometric intensity based (SCIIB) system are introduced. The signal of the optical fiber pressure sensor processing schemes is presented. With the system the cavity of the MEMS optical fiber pressure sensor is measured with high resolution by fringe analysis. The dynamic range of the measurement is large, which is from several microns to millimeters. |
| Starting Page | 1285 |
| Ending Page | 1288 |
| File Size | 129879 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424436071 |
| DOI | 10.1109/ICINFA.2009.5205114 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-06-22 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Micromechanical devices Optical fibers Microelectromechanical systems Optical fiber sensors Optical interferometry System testing Automatic testing Sensor phenomena and characterization Signal processing Sensor systems |
| Content Type | Text |
| Resource Type | Article |
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