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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Guike Li Xiaodong Wang Jiran Liang An Ji Ming Hu Fuhua Yang Jian Liu Nanjian Wu Hongda Chen |
| Copyright Year | 2008 |
| Description | Author affiliation: Nat. Lab. for Superlattices & Microstructures, Chinese Acad. of Sci., Beijing (Guike Li) |
| Abstract | A novel process of room temperature ion beam sputtering deposition of vanadium oxide films and low temperature post annealing for uncooled infrared detectors was proposed in this work. $VO_{x}$ thin films with relatively low square resistance (70 K Omega / square) and large temperature coefficient of resistance (more than 3%/K) at room temperature were fabricated using this low temperature process which was very compatible with the process of uncooled infrared detectors based on micromachined technology. Furthermore, chemical composition and film surface have been characterized using X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) respectively. The results showed that the main composition of the processed thin films was $V_{2}O_{5}$ and the thin films were in the process of crystallization. |
| Starting Page | 921 |
| Ending Page | 923 |
| File Size | 823059 |
| Page Count | 3 |
| File Format | |
| ISBN | 9781424415724 |
| DOI | 10.1109/INEC.2008.4585634 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-03-24 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Conferences Nanoelectronics |
| Content Type | Text |
| Resource Type | Article |
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