NDLI: Design of a low cost submicron measuring probe

Content Provider	IEEE Xplore Digital Library
Author	Hermann, G.
Copyright Year	2009
Description	Author affiliation: Budapest Tech H-1034 Budapest, Bécsi út 93/B, Hungary (Hermann, G.)
Abstract	In this paper a new low cost design is presented. The moving element of the probe head consists of the stylus and a crossform intermediate body with a small aluminium enhanced mirror at the two ends and at the center. The intermediate body is suspended on four springs made of berillium-copper foils. The displacement of the probe tip is calculated from the displacement and the rotations of the mirrors measured by modified optical pick-ups. In order to test probes a calibration system with 20 nm measuring uncertainty was designed. A high precision three-axis translation stage, with a working range of 100 × 100 × 100 µm, moves the probe stylus and the position of the stage is determined by three mutually-orthogonal plane mirror laser interferometer transducers having 1 nm resolution.
Starting Page	93
Ending Page	97
File Size	372762
Page Count	5
File Format	PDF
ISBN	9781424438013
DOI	10.1109/SAMI.2009.4956616
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-01-30
Publisher Place	Slovakia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical interferometry System testing Costs Aluminum Displacement measurement Calibration Mirrors Probes Springs Rotation measurement
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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