NDLI: Design of calibration system for tactile displacement probes

Content Provider	IEEE Xplore Digital Library
Author	Hermann, G.
Copyright Year	2012
Description	Author affiliation: Óbuda University, Bécsi út 96/B, H-1034 Budapest, Hungary (Hermann, G.)
Abstract	Displacement probes are currently widely used in different branches of manufacturing industry, either as building blocks of special purpose equipment or as a simple distance measuring instrument as for example in a gauge block calibrator. With the increased demand for more accurate products high resolution measuring probes gained more importance. Information about calibration procedures and equipments are rare in the literature. In the paper first the properties of the published calibration systems with nanometer resolution are discussed. Next the new calibration system having 50 nanometer measuring uncertainty is outlined The probe displacement is generated by a single-axis positioning stage driven by a stepping motor. The tip of the probe rests on the backface of the flat mirror with flatness better than λ/100, acting as the mirror of the plane mirror laser interferometer. Angular sensors are used to capture the angular deviation of the mirror in the different measuring positions. The error of the probe is the difference between the value determined by the probe and the value measured by the laser interferometer. Finally the calibration uncertainty is calculated and results are given to show the systems performance.
Starting Page	169
Ending Page	172
File Size	403139
Page Count	4
File Format	PDF
ISBN	9781467345200
e-ISBN	9781467345194
e-ISBN	9781467345187
DOI	10.1109/LINDI.2012.6319482
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-09-05
Publisher Place	Slovakia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Temperature measurement Uncertainty Measurement by laser beam Displacement measurement Calibration Mirrors Probes
Content Type	Text
Resource Type	Article

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