NDLI: Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications

Content Provider	IEEE Xplore Digital Library
Author	Schroder, S. Dogan, O. Schneidewind, J. Bertotti, G. Keil, S. Gargouri, H. Arens, M. Brose, E. Bruns, J. Wolansky, D. Tillack, B. Vassanelli, S. Szyszka, B. Thewes, R.
Copyright Year	2015
Description	Author affiliation: Fac. of Electr. Eng. & Comput. Sci., Tech. Univ. Berlin, Berlin, Germany (Schroder, S.; Dogan, O.; Bertotti, G.; Keil, S.; Brose, E.; Bruns, J.; Szyszka, B.; Thewes, R.) \|\| Technol./Process Res., IHP GmbH, Frankfurt/Oder, Germany (Wolansky, D.; Tillack, B.) \|\| SENTECH Instrum. GmbH, Berlin, Germany (Schneidewind, J.; Gargouri, H.; Arens, M.) \|\| Dept. of Anatomy & Human Physiol., Univ. of Padova, Padua, Italy (Vassanelli, S.)
Abstract	Titanium dioxide, known as a high-k biocompatible dielectric transducer material, is processed by means of ALD and applied to a 3D structure with dimensions typical for multi-site multi-channel in-vivo neural interfaces. High uniformity, high areal capacitance, and in particular low leakage current densities are achieved within a sufficiently wide operation voltage window. The results demonstrate the suitability of this process to provide dielectric interfaces for 3D biomedical applications.
Starting Page	21
Ending Page	24
File Size	1568232
Page Count	4
File Format	PDF
ISBN	9781479989812
DOI	10.1109/IWASI.2015.7184978
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-06-18
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrodes atomic layer deposition (ALD) Current measurement Tin Capacitance Dielectric measurement Silicon Dielectrics in-vivo neural interfaces biochip TiO2
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in